rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Thin film materials technology
    sub title: sputtering of compound materials
  name:
    name part: Wasa, Kiyotaka.
    role:
      role term: creator
  name:
    name part: Kitabatake, Makoto.
  name:
    name part: Adachi, Hideaki.
  name:
    name part: ScienceDirect (Online service)
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    place:
      place term: Norwich, NY
    place:
      place term: Heidelberg
    publisher: William Andrew Pub.
    publisher: Springer
    date issued: ©2004
    date issued: 2004
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xiv, 518 pages) : illustrations
  abstract: An invaluable resource for industrial science and engineering newcomers to sputter deposition technology in thin film production applications, this book is rich in coverage of both historical developments and the newest experimental and technological information about ceramic thin films, a key technology for nano-materials in high-speed information applications and large-area functional coating such as automotive or decorative painting of plastic parts, among other topics. In seven concise chapters, the book thoroughly reviews basic thin film technology and deposition processes, sputtering processes, structural control of compound thin films, and microfabrication by sputtering.
  table of contents: Thin Film Materials and Devices -- Thin Film Process -- Sputtering Phenomena -- Sputtering Systems -- Deposition of Compound Thin Films -- Structural Control of Compound Thin Films -- Microfabrication by Sputtering -- Appendices -- Index.
  note: by Kiyotaka Wasa, Makoto Kitabatake, Hideaki Adachi.
  note: Includes bibliographical references and index.
  note: English.
  subject:
    topic: Cathode sputtering (Plating process)
  subject:
    topic: Thin films
  subject:
    topic: Pulvérisation cathodique
    topic: Applications industrielles
  subject:
    topic: Couches minces
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Solid State
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Electronics
    topic: Semiconductors
  subject:
    topic: Cathode sputtering (Plating process)
  subject:
    topic: Thin films
  classification: TS695 .W38 2004eb
  classification: 621.3815/2
  related item:
    title info:
      title: Thin film materials technology
    name:
      name part: Wasa, Kiyotaka.
    origin info:
      publisher: Norwich, NY : William Andrew Pub. ; Heidelberg : Springer, ©2004
    identifier: (DLC) 2003018016
    identifier: (OCoLC)52886812
  identifier: 0815514832
  identifier: 9780815514831
  identifier: 9783540211181
  identifier: 3540211187
  identifier: 9780815519317
  identifier: 0815519311
  identifier: 1282027662
  identifier: 9781282027664
  identifier: 9786612027666
  identifier: 6612027665
  identifier: 0080946984
  identifier: 9780080946986
  identifier: Knovel Corporation
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: KNOVL
    record creation date: 041025
    record change date: 20260326144628.3
    record identifier: in00005729932
    language of cataloging:
      language term: eng