Characterization in silicon processing /
This volume is devoted to the consideration of the use use of surface, thin film and interface characterization tools in support of silicon-based semiconductor processing. The approach taken is to consider each of the types of films used in silicon devices individually in its own chapter and to disc...
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| Format: | eBook |
| Language: | English |
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Boston : Greenwich :
Butterworth-Heinemann ; Manning,
©1993.
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| Series: | Materials characterization series.
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| Online Access: | Connect to the full text of this electronic book |
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