http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
growth, processing, characterization, and devices
1 online resource (xxii, 914 pages) : illustrations
This book reviews the advances and technologies used to produce microelectronic and optoelectronic devices from compound semiconductors. It provides an overview of the technologies necessary to grow bulk single-crystal substrates, grow hetero-or homoepitaxial films, and process advanced devices such as HBT's, QW diode lasers, etc.
Bulk Crystal Growth -- MOCVD of Compound Semiconductor Layers -- Molecular Beam Epitaxy -- Physical and Chemical Deposition of Metals as Ohmic Contacts to InP and Related Materials -- Surface Processing of III-V Semiconductors -- Ion Implantation Induced Extended Defects in GaAs -- Passivation of GaAs and InP -- Wet and Dry Etching of Compound Semiconductors -- Rapid Isothermal Processing (RIP) -- Epitaxial Lift-Off for Thin Film Compound Semiconductor Devices -- Packaging -- Chemical, Structural and Electronic Characterization of Compound Semiconductor Surfaces and Interfaces by X-ray Photoelectron Spectroscopy and Diffraction Techniques -- Characterization of Compound Semiconductor Material by Ion Beams -- Optical Characterization of Compound Semiconductors -- Gallium Arsenide Microelectronic Devices and Circuits -- Optoelectronic Devices -- Acknowledgments -- References -- Index.
edited by Paul H. Holloway, Gary E. McGuire.
Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
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Includes bibliographical references and index.
Park Ridge, N.J., U.S.A. : Noyes Publications, ©1995
Materials science and process technology series
Electronic materials and process technology
153778:153938 Elsevier Science & Technology