Handbook of physical vapor deposition (PVD) processing : film formation, adhesion, surface preparation and contamination control /
Covers aspects of the Physical Vapor Deposition process technology from characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. Includes subjects such as substrate characterization, adhesion, cleaning, and processin...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Westwood, N.J. :
Noyes Publications,
©1998.
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| Online Access: | Connect to the full text of this electronic book |
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