Semiconductor safety handbook : safety and health in the semiconductor industry /
The purpose of the Semiconductor Safety Handbook is to provide a current, single source reference for many of the primary semiconductor EH & S technologies and disciplines. To this end, the contributors have assembled a comprehensive text written by some of the leading experts in EH & S in t...
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| Format: | eBook |
| Language: | English |
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Westwood, N.J. :
Noyes Publications,
©1998.
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| Series: | Semiconductor safety series.
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Injury and Illness of Semiconductor Workers: Experience and Epidemiologic Studies
- Environmental Compliance in the Semiconductor Industry: Detection, Correction and Prevention
- Chemical Hazards in Semiconductor Operations
- Industrial Hygiene
- Electrical Hazards
- Radiation Safety
- Recognition, Evaluation and Control of Some Plasma Processing Hazards
- Fire Protection Technology for Semiconductor Operations
- Building and Fire Codes Impacting the Semiconductor Industry
- Gases and Gas Equipment
- Toxic Gas Monitoring
- References
- Index.