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High density plasma sources : design, physics, and performance /

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This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielec...

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Bibliographic Details
Corporate Author: ScienceDirect (Online service)
Other Authors: Popov, Oleg A.
Format: eBook
Language:English
Language Notes:English.
Published: Park Ridge, N.J. : Noyes Publications, ©1995.
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Plasma density.
High temperature plasmas.
Plasma generators.
Plasma (Gaz ionisés) > Densité.
Plasmas chauds.
Générateurs de plasma.
TECHNOLOGY & ENGINEERING > Mechanical.
High temperature plasmas
Plasma density
Plasma generators
Electronic books.
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Published 1995
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Published 1995
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