Spectroscopic ellipsometry : principles and applications /
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Chichester, England ; Hoboken, NJ :
John Wiley & Sons,
©2007.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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