Spectroscopic ellipsometry : principles and applications /
Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
| Published: |
Chichester, England ; Hoboken, NJ :
John Wiley & Sons,
©2007.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control wh. |
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| Physical Description: | 1 online resource (xviii, 369 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9780470060193 0470060190 9780470060186 0470060182 1281002119 9781281002112 9786611002114 6611002111 |