Cover Image

Handbook of semiconductor interconnection technology /

Show other versions (1)

First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many o...

Full description

Bibliographic Details
Corporate Authors: Schwartz Geraldine C (Corporate Author.), Taylor & Francis
Other Authors: Schwartz, G. C., Srikrishnan, K. V., 1948-
Format: eBook
Language:English
Language Notes:English.
Published: Boca Raton, FL : CRC/Taylor & Francis, 2006.
Edition:2nd ed.
Subjects:
Interconnects (Integrated circuit technology)
Semiconductors > Junctions.
Semiconductors > Design and construction.
Interconnexions (Technologie des circuits intégrés)
Semi-conducteurs > Jonctions.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Preface; The Editors; Contributors; Contents; CHAPTER 1 Methods/Principles of Deposition and Etching of Thin Films; CHAPTER 2 Characterization; CHAPTER 3 Semiconductor Contact Technology; CHAPTER 4 Interlevel Dielectrics; CHAPTER 5 Metallization; CHAPTER 6 Chip Integration; CHAPTER 7 Reliability; Index