rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of semiconductor interconnection technology
  name:
    name part: Schwartz Geraldine C
    role:
      role term: creator
    role:
      role term: Corporate Author.
  name:
    name part: Schwartz, G. C.
  name:
    name part: Srikrishnan, K. V.
    name part: 1948-
  name:
    name part: Taylor & Francis
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: flu
    date issued: 2006
    edition: 2nd ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (533 p.)
  abstract: First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the ""likely directions"" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available,
  table of contents: Preface; The Editors; Contributors; Contents; CHAPTER 1 Methods/Principles of Deposition and Etching of Thin Films; CHAPTER 2 Characterization; CHAPTER 3 Semiconductor Contact Technology; CHAPTER 4 Interlevel Dielectrics; CHAPTER 5 Metallization; CHAPTER 6 Chip Integration; CHAPTER 7 Reliability; Index
  note: edited by Geraldine C. Schwartz, Kris V. Srikrishnan.
  note: Description based upon print version of record.
  note: English.
  note: Includes bibliographical references and index.
  subject:
    topic: Interconnects (Integrated circuit technology)
  subject:
    topic: Semiconductors
    topic: Junctions
  subject:
    topic: Semiconductors
    topic: Design and construction
  subject:
    topic: Interconnexions (Technologie des circuits intégrés)
  subject:
    topic: Semi-conducteurs
    topic: Jonctions
  classification: TK7874.53 .H36 2006
  classification: 621.3815
  identifier: 0429136137
  identifier: 9780429136139
  identifier: 1280504560
  identifier: 9781280504563
  identifier: 9786610504565
  identifier: 6610504563
  identifier: 1420017659
  identifier: 9781420017656
  identifier: 2005054909
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: DXU
    record creation date: 180331
    record change date: 20260205203603.6
    record identifier: in00005680903
    language of cataloging:
      language term: eng