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180331s2006 flua ob 001 0 eng d |
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|a DXU
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|a 0429136137
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|a 9780429136139
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|a 10.1201/9781420017656
|2 doi
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|a (OCoLC)1443960786
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|a TK7874.53
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| 082 |
0 |
4 |
|a 621.3815
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| 049 |
|
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|a TXAM
|
| 110 |
2 |
|
|a Schwartz Geraldine C
|e Corporate Author.
|
| 245 |
1 |
0 |
|a Handbook of semiconductor interconnection technology /
|c edited by Geraldine C. Schwartz, Kris V. Srikrishnan.
|
| 250 |
|
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|a 2nd ed.
|
| 264 |
|
1 |
|a Boca Raton, FL :
|b CRC/Taylor & Francis,
|c 2006.
|
| 300 |
|
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|a 1 online resource (533 p.)
|
| 336 |
|
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|a text
|b txt
|2 rdacontent
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|
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|a computer
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|2 rdamedia
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| 338 |
|
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|a online resource
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|a Description based upon print version of record.
|
| 505 |
0 |
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|a Preface; The Editors; Contributors; Contents; CHAPTER 1 Methods/Principles of Deposition and Etching of Thin Films; CHAPTER 2 Characterization; CHAPTER 3 Semiconductor Contact Technology; CHAPTER 4 Interlevel Dielectrics; CHAPTER 5 Metallization; CHAPTER 6 Chip Integration; CHAPTER 7 Reliability; Index
|
| 520 |
|
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|a First introduced about a decade ago, the first edition of the Handbook of Semiconductor Interconnection Technology became widely popular for its thorough, integrated treatment of interconnect technologies and its forward-looking perspective. The field has grown tremendously in the interim and many of the ""likely directions"" outlined in the first edition are now standard in modern facilities. Reflecting those advances, this edition delves into the practical aspects of interconnections for manufacturing. It examines the interconnect and fabrication technologies now available,
|
| 546 |
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|a English.
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| 504 |
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|a Includes bibliographical references and index.
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| 650 |
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0 |
|a Interconnects (Integrated circuit technology)
|
| 650 |
|
0 |
|a Semiconductors
|x Junctions.
|
| 650 |
|
0 |
|a Semiconductors
|x Design and construction.
|
| 650 |
|
6 |
|a Interconnexions (Technologie des circuits intégrés)
|
| 650 |
|
6 |
|a Semi-conducteurs
|x Jonctions.
|
| 655 |
|
7 |
|a Electronic books.
|2 local
|
| 700 |
1 |
|
|a Schwartz, G. C.
|
| 700 |
1 |
|
|a Srikrishnan, K. V.,
|d 1948-
|1 https://id.oclc.org/worldcat/entity/E39PCjy8RcGbhrcFG89FqkMF8C
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2 |
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|a Taylor & Francis.
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| 776 |
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|z 1574446746
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|u http://proxy.library.tamu.edu/login?url=https://www.taylorfrancis.com/books/9780429136139
|z Connect to the full text of this electronic book
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f |
|a Texas A&M University
|b College Station
|c Electronic Resources
|s www_evans
|d Available Online
|t 0
|e TK7874.53 .H36 2006
|h Library of Congress classification
|
| 998 |
f |
f |
|a TK7874.53 .H36 2006
|t 0
|l Available Online
|