Tribology in chemical-mechanical planarization /
The role that friction and contact play in the processes of wear and planarization on material surfaces is central to the understanding of Chemical-Mechanical planarization (CMP) technology, particularly when applied to nanosurfaces. Tribology in Chemical-Mechanical Planarization presents a detailed...
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| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
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Boca Raton, Fla. :
Taylor & Francis,
2005.
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| Online Access: | Connect to the full text of this electronic book |
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