APA (7th ed.) Citation

Liang, H., & Craven, D. R. (2005). Tribology in chemical-mechanical planarization. Taylor & Francis.

Chicago Style (17th ed.) Citation

Liang, Hong, and David R. Craven. Tribology in Chemical-mechanical Planarization. Boca Raton, Fla.: Taylor & Francis, 2005.

MLA (9th ed.) Citation

Liang, Hong, and David R. Craven. Tribology in Chemical-mechanical Planarization. Taylor & Francis, 2005.