http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Lapping and polishing are currently the most precise surface finishing processes for mechanical and electronic components. Unfortunately, most improvements in either methods or understanding of the physical processes involved are closely guarded as proprietary information. The Handbook of Lapping and Polishing is the first source in English to bring to the light of day the physical fundamentals and advanced technologies at the leading edge of modern lapping and polishing practice.Collecting decisive work contributed by industrial and academic experts from the USA, Germany, and Japan, t.
Front cover; Preface; Editors; Contributors; Table of Contents; Chapter 1. Introduction; Chapter 2. Fundamentals of Lapping; Chapter 3. Lapping of Ductile Materials; Chapter 4. Lapping of Brittle Materials; Chapter 5. Lapping and Lapping Machines; Chapter 6. Polishing Technology; Chapter 7. Chemical Mechanical Polishing and Its Applications in ULSI Process; Index; Back cover
edited by Ioan D. Marinescu, Eckart Uhlmann, Toshiro K. Doi.
Description based upon print version of record.
Includes bibliographical references and index.
Manufacturing engineering and materials processing ; 73