MEMS : applications /

Bibliographic Details
Corporate Author:	Taylor & Francis
Other Authors:	Gad-el-Hak, Mohamed, 1945-
Format:	eBook
Language:	English
Published:	Boca Raton, FL : CRC Press/Taylor & Francis, 2006.
Edition:	Second edition.
Series:	Mechanical engineering series (Boca Raton, Fla.)
Subjects:	Microelectromechanical systems. Detectors. Microactuators. Robots. Microsystèmes électromécaniques. Microactionneurs. Detectors Microactuators Microelectromechanical systems Robots Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Previous edition was published as: The MEMS handbook.
Physical Description:	1 online resource (various pagings) : illustrations. Also issued in print.
Bibliography:	Includes bibliographical references and index.
ISBN:	0849391393 9780849391392 0849321069 9780849321061 1420036556 9781420036558 6610643288 9786610643288