Handbook of surface and nanometrology /
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| Corporate Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
c2011.
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| Edition: | 2nd ed. |
| Series: | Online access with subscription: Proquest Ebook Central.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Rev. ed. of: Handbook of surface metrology. c1994. |
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| Physical Description: | 1 online resource (xxiii, 975 p.) : ill. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1420082019 9781420082012 |