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Microlithography fundamentals in semiconductor devices and fabrication technology /

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Bibliographic Details
Main Authors: Nonogaki, Saburo, 1930- (Author), Itō, Toshio (Author), Ueno, Takumi, 1951- (Author)
Corporate Author: Taylor & Francis
Format: eBook
Language:English
Language Notes:English.
Published: Boca Raton, FL : CRC Press, 2018.
Subjects:
Manufacturing processes.
Microlithography > Industrial applications.
Photoresists.
Semiconductors > Design and construction.
Fabrication.
Microlithographie > Applications industrielles.
Résines photosensibles.
manufacturing.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
TECHNOLOGY & ENGINEERING > Mechanical.
Manufacturing processes
Microlithography > Industrial applications
Photoresists
Semiconductors > Design and construction
Electronic books.
Online Access:Connect to the full text of this electronic book
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by Nonogaki, Saburo, 1930-
Published 1998
Book
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