Lyshevski, S. E. (2017). MEMS and NEMS: Systems, Devices, and Structures (First edition.). Taylor and Francis.
Chicago Style (17th ed.) CitationLyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. First edition. London: Taylor and Francis, 2017.
MLA (9th ed.) CitationLyshevski, Sergey Edward. MEMS and NEMS: Systems, Devices, and Structures. First edition. Taylor and Francis, 2017.
Warning: These citations may not always be 100% accurate.