rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Handbook of semiconductor manufacturing technology
  name:
    name part: Doering, Robert
    name part: 1946-
  name:
    name part: Nishi, Yoshio
    name part: 1940-
  name:
    name part: Taylor & Francis
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  genre: Handbooks and manuals
  origin info:
    place:
      place term: flu
    place:
      place term: Boca Raton
    publisher: CRC Press
    date issued: ©2008
    date issued: 2008
    edition: 2nd ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (1720 pages) : illustrations
  table of contents: Chapter 1 Introduction to Semiconductor Devices -- chapter 2 Overview of Interconnect—Copper and Low-K Integration -- chapter 3 Silicon Materials -- chapter 4 SOI Materials and Devices -- chapter 5 Surface Preparation -- chapter 6 Supercritical Carbon Dioxide in Semiconductor Cleaning -- chapter 7 Ion Implantation -- chapter 8 Dopant Diffusion -- chapter 9 Oxidation and Gate Dielectrics -- chapter 10 Silicides -- chapter 11 Rapid Thermal Processing -- chapter 12 Low-K Dielectrics -- chapter 13 Chemical Vapor Deposition -- chapter 14 Atomic Layer Deposition -- chapter 15 Physical Vapor Deposition -- chapter 16 Damascene Copper Electroplating -- chapter 17 Chemical–Mechanical Polishing -- chapter 18 Optical Lithography -- chapter 19 Photoresist Materials and Processing -- chapter 20 Photomask Fabrication -- chapter 21 Plasma Etch -- chapter 22 Equipment Reliability -- chapter 23 Overview of Process Control -- chapter 24 In-Line Metrology -- chapter 25 In-Situ Metrology -- chapter 26 Yield Modeling -- chapter 27 Yield Management -- chapter 28 Electrical, Physical, and Chemical Characterization -- chapter 29 Failure Analysis -- chapter 30 Reliability Physics and Engineering -- chapter 31 Effects of Terrestrial Radiation on Integrated Circuits -- chapter 32 Integrated-Circuit Packaging -- chapter 33 300 mm Wafer Fab Logistics and Automated Material Handling Systems -- chapter 34 Factory Modeling -- chapter 35 Economics of Semiconductor Manufacturing.
  note: edited by Robert Doering, Yoshio Nishi.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Design and construction
    genre: Handbooks, manuals, etc
  subject:
    topic: Semiconductor industry
    genre: Handbooks, manuals, etc
  subject:
    topic: Semi-conducteurs
    topic: Industrie
    genre: Guides, manuels, etc
  subject:
    topic: Semiconductor industry
  subject:
    topic: Semiconductors
    topic: Design and construction
  classification: TK7871.85 .H3335 2008
  classification: 621.38152 H236
  identifier: 9781420017663
  identifier: 1420017667
  identifier: 9781315213934
  identifier: 1315213931
  identifier: 9781351821131
  identifier: 135182113X
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: OTZ
    record creation date: 061219
    record change date: 20260205201956.4
    record identifier: in00005679314
    language of cataloging:
      language term: eng