http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Handbook of semiconductor manufacturing technology
1 online resource (1720 pages) : illustrations
Chapter 1 Introduction to Semiconductor Devices -- chapter 2 Overview of Interconnect—Copper and Low-K Integration -- chapter 3 Silicon Materials -- chapter 4 SOI Materials and Devices -- chapter 5 Surface Preparation -- chapter 6 Supercritical Carbon Dioxide in Semiconductor Cleaning -- chapter 7 Ion Implantation -- chapter 8 Dopant Diffusion -- chapter 9 Oxidation and Gate Dielectrics -- chapter 10 Silicides -- chapter 11 Rapid Thermal Processing -- chapter 12 Low-K Dielectrics -- chapter 13 Chemical Vapor Deposition -- chapter 14 Atomic Layer Deposition -- chapter 15 Physical Vapor Deposition -- chapter 16 Damascene Copper Electroplating -- chapter 17 Chemical–Mechanical Polishing -- chapter 18 Optical Lithography -- chapter 19 Photoresist Materials and Processing -- chapter 20 Photomask Fabrication -- chapter 21 Plasma Etch -- chapter 22 Equipment Reliability -- chapter 23 Overview of Process Control -- chapter 24 In-Line Metrology -- chapter 25 In-Situ Metrology -- chapter 26 Yield Modeling -- chapter 27 Yield Management -- chapter 28 Electrical, Physical, and Chemical Characterization -- chapter 29 Failure Analysis -- chapter 30 Reliability Physics and Engineering -- chapter 31 Effects of Terrestrial Radiation on Integrated Circuits -- chapter 32 Integrated-Circuit Packaging -- chapter 33 300 mm Wafer Fab Logistics and Automated Material Handling Systems -- chapter 34 Factory Modeling -- chapter 35 Economics of Semiconductor Manufacturing.
Includes bibliographical references and index.