Handbook of semiconductor manufacturing technology /
| Corporate Author: | |
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Published: |
Boca Raton :
CRC Press,
©2008.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (1720 pages) : illustrations |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781420017663 1420017667 9781315213934 1315213931 9781351821131 135182113X |