Nanoscale silicon devices /

Bibliographic Details
Corporate Author:	Taylor & Francis
Other Authors:	Oda, Shunri (Editor), Ferry, David K. (Editor)
Format:	eBook
Language:	English
Published:	Boca Raton : CRC Press, [2016]
Subjects:	Nanoelectromechanical systems. Nanotechnology. Silicon crystals > Electric properties. Nanosystèmes électromécaniques. Nanotechnologie. TECHNOLOGY & ENGINEERING > Mechanical. Nanoelectromechanical systems Nanotechnology Silicon crystals > Electric properties Electronic books.
Online Access:	Connect to the full text of this electronic book

Description
Physical Description:	1 online resource : color illustrations
Bibliography:	Includes bibliographical references.
ISBN:	9781482228687 1482228688 148222867X 9781482228670 9781315215341 1315215349 9781351822541 1351822543 9781138749320 113874932X