High-k materials in multi-gate FET devices /
"This book focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies. This work will be of high interest to researchers in materials science, electronics engineering, IT, and relat...
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| Format: | eBook |
| Language: | English |
| Published: |
Boca Raton, FL :
CRC Press,
2021.
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| Edition: | First edition. |
| Series: | Science, technology, and management series.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | "This book focuses on high-k materials for advanced FET devices. It discusses emerging challenges in the engineering and applications and considers issues with associated technologies. This work will be of high interest to researchers in materials science, electronics engineering, IT, and related disciplines studying nanodevices such as FinFET and Tunnel FET and device-circuit codesign issues"-- |
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| Physical Description: | 1 online resource (xii, 164 pages) : illustrations. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781003121589 1003121586 9781000438789 1000438783 9781000438819 1000438813 |