Nanofabrication handbook /
While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication....
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| Other Authors: | , |
| Format: | eBook |
| Language: | English |
| Language Notes: | English. |
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Boca Raton, FL :
CRC Press,
©2012.
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- pt. 1. Standard lithography
- pt. 2. New lithographic techniques
- pt. 3. Nanofabrication applications.