Nanofabrication handbook /

While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication....

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Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Cabrini, Stefano, Kawata, Satoshi, 1966-
Format: eBook
Language:English
Language Notes:English.
Published: Boca Raton, FL : CRC Press, ©2012.
Subjects:
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • pt. 1. Standard lithography
  • pt. 2. New lithographic techniques
  • pt. 3. Nanofabrication applications.