rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Nanofabrication handbook
  name:
    name part: Cabrini, Stefano.
  name:
    name part: Kawata, Satoshi
    name part: 1966-
  name:
    name part: Taylor & Francis
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  genre: manuals (instructional materials)
  genre: handbooks.
  genre: Handbooks and manuals
  genre: Handbooks and manuals.
  genre: Guides et manuels.
  origin info:
    place:
      place term: flu
    place:
      place term: Boca Raton, FL
    publisher: CRC Press
    date issued: ©2012
    date issued: 2012
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xv, 518 pages) : illustrations
  abstract: While many books are dedicated to individual aspects of nanofabrication, there is no single source that defines and explains the total vision of the field. Filling this gap, Nanofabrication Handbook presents a unique collection of new and the most important established approaches to nanofabrication. Contributors from leading research facilities and academic institutions around the world define subfields, offer practical instructions and examples, and pave the way for future research. Helping readers to select the proper fabricating technique for their experimen.
  table of contents: pt. 1. Standard lithography -- pt. 2. New lithographic techniques -- pt. 3. Nanofabrication applications.
  note: edited by Stefano Cabrini, Satoshi Kawata.
  note: Includes bibliographical references and index.
  note: English.
  subject:
    topic: Nanostructured materials
    genre: Handbooks, manuals, etc
  subject:
    topic: Nanostructures
    genre: Handbooks, manuals, etc
  subject:
    topic: Nanomatériaux
    genre: Guides, manuels, etc
  subject:
    topic: Nanostructures
    genre: Guides, manuels, etc
  subject:
    topic: TECHNOLOGY & ENGINEERING
    topic: Material Science
  subject:
    topic: Nanostructured materials
  subject:
    topic: Nanostructures
  classification: TA418.9.N35 N2523 2012eb
  classification: 620.1/15
  related item:
    title info:
      title: Nanofabrication handbook
    origin info:
      publisher: Boca Raton, FL : CRC Press, ©2012
    identifier: (DLC) 2011037490
    identifier: (OCoLC)229022847
  identifier: 9781420090536
  identifier: 1420090534
  identifier: 1280121521
  identifier: 9781280121524
  identifier: 9781420090529
  identifier: 1420090526
  identifier: 0429193297
  identifier: 9780429193293
  identifier: 9786613525383
  identifier: 6613525383
  identifier: 2011037490
  identifier: TANDF_189988 Ingram Content Group
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: N$T
    record creation date: 120326
    record change date: 20241108165624.4
    record identifier: in00005521844
    language of cataloging:
      language term: eng