http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Fundamentals of microfabrication and nanotechnology
Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
Historical Note: The Ascent of Silicon, MEMS, and NEMS CrystallographyIntroductionBravais Lattice, Unit Cells, and the BasisPoint Groups and Space GroupsMiller IndicesX-Ray AnalysisReciprocal Space, Fourier Space, k-Space, or Momentum SpaceBrillouin ZonesNothing Is PerfectAcknowledgmentsAppendix 2A: Plane WaveEquationsQuestionsFurther ReadingReferenceQuantum Mechanics and the Band Theory of SolidsIntroductionClassical Theory Starts FalteringQuantum Mechanics to the RescueBeyond Schrödinger's EquationSilicon Single Crystal Is Still KingIntroductionSi CrystallographySingle-Crystal Structure and.
Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS; Chapter 2: Crystallography; Chapter 3: Quantum Mechanics and the Band Theory of Solids; Chapter 4: Silicon Single Crystal Is Still King; Chapter 5: Photonics; Chapter 6: Fluidics; Chapter 7: Electrochemical and Optical Analytical Techniques; Back Cover.
Print version cataloged as a monographic set by the Library of Congress.