rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Fundamentals of microfabrication and nanotechnology
  title info:
    title: Solid-state physics, fluidics, and analytical techniques in micro- and nanotechnology
  name:
    name part: Madou, Marc J.
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: Taylor & Francis
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: flu
    date issued: 2011
    edition: Third edition.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource
  abstract: Historical Note: The Ascent of Silicon, MEMS, and NEMS CrystallographyIntroductionBravais Lattice, Unit Cells, and the BasisPoint Groups and Space GroupsMiller IndicesX-Ray AnalysisReciprocal Space, Fourier Space, k-Space, or Momentum SpaceBrillouin ZonesNothing Is PerfectAcknowledgmentsAppendix 2A: Plane WaveEquationsQuestionsFurther ReadingReferenceQuantum Mechanics and the Band Theory of SolidsIntroductionClassical Theory Starts FalteringQuantum Mechanics to the RescueBeyond Schrödinger's EquationSilicon Single Crystal Is Still KingIntroductionSi CrystallographySingle-Crystal Structure and.
  table of contents: Front Cover; Contents; Roadmap; Author; Acknowledgments; Chapter 1: Historical Note: The Ascent of Silicon, MEMS, and NEMS; Chapter 2: Crystallography; Chapter 3: Quantum Mechanics and the Band Theory of Solids; Chapter 4: Silicon Single Crystal Is Still King; Chapter 5: Photonics; Chapter 6: Fluidics; Chapter 7: Electrochemical and Optical Analytical Techniques; Back Cover.
  note: Marc J. Madou.
  note: Print version cataloged as a monographic set by the Library of Congress.
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Nanoelectromechanical systems
  subject:
    topic: Microfluidics
  subject:
    topic: Solid state physics
  subject:
    topic: Micro-Electrical-Mechanical Systems
  subject:
    topic: Microfluidics
  subject:
    topic: Microsystèmes électromécaniques
  subject:
    topic: Nanosystèmes électromécaniques
  subject:
    topic: Microfluidique
  subject:
    topic: Physique de l'état solide
  subject:
    topic: Microelectromechanical systems
  subject:
    topic: Microfluidics
  subject:
    topic: Nanoelectromechanical systems
  subject:
    topic: Solid state physics
  classification: TK7875 .M33 2011
  classification: 620.5
  related item:
    title info:
      title: Fundamentals of microfabrication and nanotechnology
    name:
      name part: Madou, Marc J.
    origin info:
      publisher: Boca Raton, FL : CRC Press, ©2012
      edition: 3rd ed.
    identifier: (DLC) 2011014406
    identifier: (OCoLC)727047810
  identifier: 9781315274164
  identifier: 1315274167
  identifier: 9781439895344
  identifier: 1439895341
  identifier: 9781482274660
  identifier: 1482274663
  identifier: 9781420055115
  identifier: 1420055119
  identifier: 9781420055191
  identifier: 1420055194
  identifier: 9781420055160
  identifier: 142005516X
  identifier: 9780849331800
  identifier: 0849331803
  identifier: 9780429112485 Taylor & Francis
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: YDX
    record creation date: 160204
    record change date: 20241108165755.9
    record identifier: in00005521741
    language of cataloging:
      language term: eng