Crystal growth and evaluation of silicon for VLSI and ULSI /
Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because...
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| Format: | eBook |
| Language: | English |
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Boca Raton :
CRC Press,
[2015]
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| Online Access: | Connect to the full text of this electronic book Connect to the full text of this electronic book |
| Summary: | Silicon, as a single-crystal semiconductor, has sparked a revolution in the field of electronics and touched nearly every field of science and technology. Though available abundantly as silica and in various other forms in nature, silicon is difficult to separate from its chemical compounds because of its reactivity. As a solid, silicon is chemically inert and stable, but growing it as a single crystal creates many technological challenges. |
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| Item Description: | "A Chapman & Hall book." |
| Physical Description: | 1 online resource (xvii, 411 pages) : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781482232820 1482232820 9780429068393 0429068395 9781322637693 1322637695 |