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Scientific wet process technology for innovative LSI/FPD manufacturing /

Presents developments and technologies for producing electronic circuits and displays. This book introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the molecule-reaction-based technologies. It details the procedures and concepts involved in we...

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Bibliographic Details
Corporate Author: Taylor & Francis
Other Authors: Ōmi, Tadahiro, 1939-2016
Format: eBook
Language:English
Published: Boca Raton, FL : CRC/Taylor & Francis, 2006.
Subjects:
Integrated circuits > Design and construction.
Semiconductors > Cleaning.
Semiconductors > Design and construction.
Circuits intégrés > Conception et construction.
Semi-conducteurs > Nettoyage.
TECHNOLOGY & ENGINEERING > Electronics > Solid State.
TECHNOLOGY & ENGINEERING > Electronics > Semiconductors.
Integrated circuits > Design and construction
Semiconductors > Cleaning
Semiconductors > Design and construction
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Presents developments and technologies for producing electronic circuits and displays. This book introduces radical-reaction-based semiconductor manufacturing technologies that overcome the limitations of the molecule-reaction-based technologies. It details the procedures and concepts involved in wet process technologies and applications.
Physical Description:1 online resource (386 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:0849335434
9780849335433
1420026860
9781420026863