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Nano-CMOS gate dielectric engineering /

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Nano-CMOS Gate Dielectric Engineering.

Bibliographic Details
Main Author: Wong, Hei
Corporate Author: Taylor & Francis
Format: eBook
Language:English
Published: Boca Raton, FL : CRC Press, ©2012.
Subjects:
Metal oxide semiconductors, Complementary > Design and construction.
Dielectrics.
Gate array circuits.
Nanoelectronics > Materials.
Circuits prédiffusés.
Nanoélectronique > Matériaux.
TECHNOLOGY & ENGINEERING > Mechanical.
Dielectrics
Gate array circuits
Metal oxide semiconductors, Complementary > Design and construction
Electronic books.
Online Access:Connect to the full text of this electronic book
Connect to the full text of this electronic book
Table of Contents:
  • 1. Overview of CMOS technology
  • 2. High-k dielectrics
  • 3. Complex forms of high-k oxides
  • 4. Dielectric interfaces
  • 5. Impacts on device operation
  • 6. Fabrication issues
  • 7. Conclusions.