Handbook of silicon semiconductor metrology /
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| Format: | eBook |
| Language: | English |
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New York :
Marcel Dekker,
2001.
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| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (xvi, 874 pages) : illustrations |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0824705068 9780824705060 0585418322 9780585418322 9780203904541 0203904540 9781135554842 1135554846 9781135554798 113555479X 9781135554835 1135554838 |