APA (7th ed.) Citation

Taylor & Francis & Diebold, A. C. (2001). Handbook of silicon semiconductor metrology. Marcel Dekker.

Chicago Style (17th ed.) Citation

Taylor & Francis and A. C. Diebold. Handbook of Silicon Semiconductor Metrology. New York: Marcel Dekker, 2001.

MLA (9th ed.) Citation

Taylor & Francis and A. C. Diebold. Handbook of Silicon Semiconductor Metrology. Marcel Dekker, 2001.