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Semiconductor manufacturing handbook /

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Annotation WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged w...

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Bibliographic Details
Corporate Authors: McGraw-Hill Companies, IDC Corporation
Other Authors: Geng, Hwaiyu, Zhou, Lin, Park, Ilsun, Ravi, K. V., Rathore, Hazara S., Chanda, Kaushik, Ren, L. P., Tu, King N., Coumou, David J., Biltoft, Peter, Howard, Charles, Mack, Chris A., Graf, Michael, Zhang, Peng, Lai, Shouliang, Solzbacher, Florian, McInerney, Edward J., Ramdani, Jamal, Vaccari, Giovanni, Ritzdorf, Tom, Klocke, John, Dyer, Timothy S., Machamer, Andrew, Blair, Donald W., Arai, Kazuhisa, Kobayashi, Yoshikazu, Otani, Hideaki, Tonnies, Dietrich, Topper, Michael, Wang, Zhong L., Huff, Michael A., Liu, David N., Curcie, Wayne D., Sweeney, Joseph D., Cox, James C., Cavicchi, Kristin, Barsness, Dan, Gould, Charles K., Albrecht, David J., Li, Bo, Carriker, Wayne, Haris, Clint, Peltinov, Ram, Menaker, Mina, Scibilia, Bruno, Altis, Yoan Dupret, McCafferty, Robert H., Davis, Brett J., Trammell, Steven R., Pavlotsky, Richard V., Beck, Stephen C., Gendreau, Michael, Amick, Hal, Levit, Larry, Muller, Chris, Kochevar, Steven, Gromala, Jerry, Pinkowski, Richard E.
Format: eBook
Language:English
Language Notes:In English.
Published: New York, N.Y. : McGraw-Hill Education, [2005]
Edition:First edition.
Series:McGraw-Hill's AccessEngineering.
Subjects:
Semiconductors > Design and construction.
Integrated circuits > Design and construction.
Semiconductors > Materials.
Integrated circuits > Reliability.
Dielectrics.
Silicides.
Plasma engineering.
Process control.
Vacuum techology.
Integrated circuits > Masks.
Microlithography.
Ion implantation.
Rapid thermal process.
Plasma etching.
Etching.
Physical vapor deposition.
Chemical vapor deposition.
Epitaxy.
Electrolytic polishing.
Semiconductors > Polishing.
Semiconductors > Cleaning.
Grinding and polishing.
Microelectronic packaging.
Electronic packaging.
Nanotechnology.
Microfabrication.
Microelectromechanical systems.
Flat panel displays.
Gases.
Waste gases > Purification.
Hydraulic conveying.
Slurry pipelines.
Chemical plants > Waste disposal.
Water-supply engineering.
Materials handling.
Metrology.
Six sigma (Quality control standard)
Semiconductor industry > Environmental aspects.
Semiconductor industry > Health aspects.
Semiconductor industry > Safety measures.
Clean rooms > Design and construction.
Vibration.
Noise control.
Static eliminators.
Electrostatics.
Airborne infection.
Air > Pollution.
Sewage > Purification > Neutralization.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Pt. 1. Semiconductor fundamentals and basic materials
  • part 2. Wafer processing
  • part 3. Final manufacturing
  • part 4. Nanotechnology, EMS, and FPD
  • part 5. Gases and chemicals
  • part 6. Fab yield, operations, and facilities.