Microchip fabrication : a practical guide to semiconductor processing /

Bibliographic Details
Main Author:	Van Zant, Peter
Corporate Author:	McGraw-Hill Companies
Format:	eBook
Language:	English
Published:	New York : McGraw-Hill, [2004]
Edition:	5th ed.
Series:	McGraw-Hill's AccessEngineering.
Subjects:	Semiconductors > Design and construction. Integrated circuits > Design and construction. Semiconductor industry. Semiconductors > Materials. Chemicals. Crystal growth. Semiconductor wafers. Semiconductors > Defects. Contamination (Technology) Industrial productivity. Oxidation. Microelectronics. Microlithography. Photolithography. Semiconductor doping. Semiconductor films. Thin films. Surfaces (Technology) Metallizing. Semiconductor waters > Design and construction. Electronic packaging. Electronic books. Internet resources.
Online Access:	Connect to the full text of this electronic book

Description
Item Description:	Print version c2004.
Physical Description:	1 online resource(xiii, 642 pages) : illustrations. Also issued in print and PDF version.
Bibliography:	Includes bibliographical references and index.
ISBN:	0071450211 9780071432412