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IEEE International Conference on Advanced Thermal Processing of Semiconductors.

Bibliographic Details
Previous Title:International Conference on Advanced Thermal Processing of Semiconductors. RTP
Corporate Author: IEEE International Conference on Advanced Thermal Processing of Semiconductors
Format: Conference Proceeding
Language:English
Published: Piscataway, N.J. : IEEE
Subjects:
Semiconductors > Heat treatment > Congresses > Periodicals.
Rapid thermal processing > Congresses > Periodicals.
Semiconductor doping > Congresses > Periodicals.
Semiconductors > Defects > Congresses > Periodicals.
Semi-conducteurs > Traitement thermique > Congr�es.
Recuit thermique rapide > Congr�es.
Semi-conducteurs > Dopage > Congr�es.
Semi-conducteurs > D�efauts > Congr�es.
Rapid thermal processing.
Semiconductor doping.
Semiconductors > Defects.
Semiconductors > Heat treatment.
Conference papers and proceedings.
Periodicals.
Online Availability: Check for online availability
Description
Published:10th (Sept. 25-27, 2002)-
Began with 10th (Sept. 25-27, 2002).
Item Description:Vols. for 2002-2007 cataloged as monographs in LC.
Physical Description:1 online resource
Publication Frequency:Annual
Format:Mode of Access: World Wide Web.