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Photon sources for lithography and metrology /

Photon sources enable the extension of lithography and metrology technologies for continued scaling of circuit elements and therefore are the key drivers for the extension of Moore's law. This comprehensive, 28-chapter volume is the authoritative reference on photon source technology and includ...

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Bibliographic Details
Other Authors:	Bakshi, Vivek (Editor)
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE Press, [2023].
Subjects:	Extreme ultraviolet lithography. Laser plasmas. Speckle metrology. Holography. Ultraviolet radiation > Industrial applications. Lasers > Industrial applications.

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