Bakshi, V. (2023). Photon sources for lithography and metrology. SPIE Press.
Chicago Style (17th ed.) CitationBakshi, Vivek. Photon Sources for Lithography and Metrology. Bellingham, Washington: SPIE Press, 2023.
MLA (9th ed.) CitationBakshi, Vivek. Photon Sources for Lithography and Metrology. SPIE Press, 2023.
Warning: These citations may not always be 100% accurate.