Hybrid micromachining and microfabrication technologies : principles, varieties and applications /
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| Format: | eBook |
| Language: | English |
| Published: |
Hoboken, NJ : Beverly, MA :
John Wiley & Sons, Inc. ; Scrivener Publishing LLC,
2023.
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| Series: | Innovations in materials and manufacturing
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Physical Description: | 1 online resource (xix, 316 pages) : illustrations (chiefly color). |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781394174942 1394174942 9781394174959 1394174950 |