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Etching in microsystem technology /

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Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these mate...

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Bibliographic Details
Main Author: Köhler, J. M. (J. Michael), 1956-
Format: eBook
Language:English
Published: Weinheim ; New York : Wiley-VCH, ©1999.
Subjects:
Masks (Electronics)
Microlithography.
Plasma etching.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Etching in Microsystem Technology; Preface; Contents; Table of Contents; Symbols; Abbreviations; 1 Introduction; 2 Distinctive Features of Microtechnical Etching; 3 Wet-Chemical Etching Methods; 4 Dry-Etching Methods; 5 Microforming by Etching of Locally Changed Material; 6 Chosen Recipes; References; Index.