Etching in microsystem technology /
Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these mate...
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| Format: | eBook |
| Language: | English |
| Published: |
Weinheim ; New York :
Wiley-VCH,
©1999.
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| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Summary: | Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching proc. |
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| Physical Description: | 1 online resource (xvi, 368 pages) : illustrations |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references ([345]-360) and index. |
| ISBN: | 9783527613786 3527613781 9783527613793 352761379X 1281764264 9781281764263 9786611764265 6611764267 |