Chemical mechanical planarization of microelectronic materials /

Bibliographic Details
Main Author:	Steigerwald, Joseph M.
Other Authors:	Murarka, S. P., Gutmann, Ronald J.
Format:	eBook
Language:	English
Published:	New York : J. Wiley, ©1997.
Subjects:	Microelectronics > Materials. Grinding and polishing. Chemical mechanical planarization. Electronic books.
Online Access:	Connect to the full text of this electronic book

by Steigerwald, Joseph M.
Published 1997

Book