rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Chemical mechanical planarization of microelectronic materials
  name:
    name part: Steigerwald, Joseph M.
    role:
      role term: creator
  name:
    name part: Murarka, S. P.
  name:
    name part: Gutmann, Ronald J.
  type of resource: text
  genre: bibliography
  genre: Electronic books.
  origin info:
    place:
      place term: nyu
    place:
      place term: New York
    publisher: J. Wiley
    date issued: ©1997
    date issued: 1997
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xiii, 324 pages) : illustrations
  note: Joseph M. Steigerwald, Shyam P. Murarka, Ronald J. Gutmann.
  note: Electronic reproduction. [Place of publication not identified] : HathiTrust Digital Library, 2010. MiAaHDL
  note: Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. http://purl.oclc.org/DLF/benchrepro0212 MiAaHDL
  note: digitized 2010 HathiTrust Digital Library committed to preserve pda MiAaHDL
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectronics
    topic: Materials
  subject:
    topic: Grinding and polishing
  subject:
    topic: Chemical mechanical planarization
  classification: TK7871 .S77 1997eb
  classification: 621.3815/2
  classification: 53.51
  related item:
    title info:
      title: Chemical mechanical planarization of microelectronic materials
    name:
      name part: Steigerwald, Joseph M.
    origin info:
      publisher: New York : J. Wiley, ©1997
    identifier: (DLC) 96006198
  identifier: 9783527617746
  identifier: 3527617744
  identifier: 9783527617753
  identifier: 3527617752
  identifier: 0471138274
  identifier: 9780471138273
  identifier: 10.1002/9783527617746 Wiley InterScience
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: NhCcYBP
    record creation date: 080227
    record change date: 20260214213755.6
    record identifier: in00004689638
    language of cataloging:
      language term: eng