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Chemical mechanical planarization of microelectronic materials /

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Bibliographic Details
Main Author: Steigerwald, Joseph M.
Other Authors: Murarka, S. P., Gutmann, Ronald J.
Format: eBook
Language:English
Published: New York : J. Wiley, ©1997.
Subjects:
Microelectronics > Materials.
Grinding and polishing.
Chemical mechanical planarization.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (xiii, 324 pages) : illustrations
Format:Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002.
Bibliography:Includes bibliographical references and index.
ISBN:9783527617746
3527617744
9783527617753
3527617752
0471138274
9780471138273