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Ätzverfahren für die Mikrotechnik /

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Bibliographic Details
Main Author: Köhler, J. M. (J. Michael), 1956-
Format: eBook
Language:German
Published: Weinheim : Wiley-VCH, ©1998.
Subjects:
Masks (Electronics)
Microlithography.
Plasma etching.
Online Access:Connect to the full text of this electronic book
Description
Physical Description:1 online resource (xvi, 398 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:3527602917
9783527602919