rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Wafer manufacturing
    sub title: shaping of single crystal silicon wafers
  name:
    name part: Kao, Imin I.
    role:
      role term: creator
    role:
      role term: author.
  name:
    name part: Chung, Chunhui
    role:
      role term: author.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nju
    date issued: 2021
    copyright date: 2021
    edition: First edition.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: remote
    extent: 1 online resource (xiv, 290 pages) : illustrations (some color)
  abstract: "A wafer (often from silicon crystals) is a thin slice of semiconducting material, upon which microcircuits are constructed by doping, etching, and deposition of various materials. Generally, they are cut from a semiconductor using a diamond saw, then polished on one or both faces. Wafer slicing is the first post crystal-growth step toward producing a polished wafer for electronic device fabrication in the semiconductor and photovoltaic (PV) industry. Advanced slicing technologies such as wiresawing are nowadays widely used in wafer production because of its ability to cut single crystalline and polycrystalline crystals with large diameter and produce wafers from thick (a few mm) to very thin sizes (300 microns)."--
  note: Imin Kao, Chunhui Chung.
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductor wafers
    topic: Design and construction
  classification: TK7871.85 .K295 2021
  classification: 621.3815/2
  related item:
    title info:
      title: Wafer manufacturing
    name:
      name part: Kao, Imin I..
    origin info:
      publisher: Hoboken, NJ : Wiley, 2021.
      edition: First edition.
    identifier: (DLC) 2020034639
  identifier: 9781118696224
  identifier: 1118696220
  identifier: 9781118696255
  identifier: 1118696255
  identifier: 9781118696231
  identifier: 1118696239
  identifier: 9780470061213
  identifier: 2020034640
  identifier: http://proxy.library.tamu.edu/login
  record info:
    record content source: DLC
    record creation date: 200730
    record change date: 20260214205756.9
    record identifier: in00004681620
    language of cataloging:
      language term: eng