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ULSI semiconductor technology atlas /

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Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process tech...

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Bibliographic Details
Main Author: Tung, Chih-Hang, 1963-
Other Authors: Sheng, George T. T., Lu, Chih-Yuan, 1950-
Format: eBook
Language:English
Language Notes:English.
Published: Hoboken, NJ : John Wiley, 2003.
Subjects:
Integrated circuits > Ultra large scale integration > Atlases.
Electron microscopy.
Microscopy, Electron
Electronic books.
Online Access:Connect to the full text of this electronic book
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by Tung, Chih-Hang, 1963-
Published 2003
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