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ULSI semiconductor technology atlas /

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Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process tech...

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Bibliographic Details
Main Author: Tung, Chih-Hang, 1963-
Other Authors: Sheng, George T. T., Lu, Chih-Yuan, 1950-
Format: eBook
Language:English
Language Notes:English.
Published: Hoboken, NJ : John Wiley, 2003.
Subjects:
Integrated circuits > Ultra large scale integration > Atlases.
Electron microscopy.
Microscopy, Electron
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Summary:Ultra Large Scale Integration (ULSI) refers to chips with more than 10,000,000 devices per chip. It is the natural outgrowth of VLSI (Very Large Scale Integration). ULSI Semiconductor Technology Atlas uses TEM (Transmission Electron Microscopy) micrographs to explain and illustrate ULSI process technologies and associated problems.
Physical Description:1 online resource (xii, 666 pages) : illustrations
Bibliography:Includes bibliographical references and index.
ISBN:0471457728
9780471457725
0471668796
9780471668794
1280556803
9781280556807
9786610556809
6610556806
0471668788
9780471668787
0470357444
9780470357446