Cleanroom design /
| Other Authors: | |
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| Format: | eBook |
| Language: | English |
| Published: |
Chichester, West Sussex, England ; New York :
Wiley,
1999.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- An introduction to the design of clean and containment areas / W. Whyte
- International standards for the design of cleanrooms / A.L. Moller
- The design of cleanrooms for the microelectronics industry / J.G. King
- The design of cleanrooms for the pharmaceutical industry / G.J. Farquharson and W. Whyte
- The design of cleanrooms for the medical device industry / H.H. Schicht
- Contamination control facilities for the biotechnology industry / P.J. Tubito and T.J. Latham
- Cost-efficiency and energy-saving concepts for cleanrooms / H.H. Schicht
- High efficiency air filtration / S.D. Klocke and W. Whyte
- Construction materials and surface finishes for cleanrooms / E.C. Sirch
- Purification techniques for clean water / T. Hodgkiess
- The design of an ultra-pure water system for use in the manufacture of integrated circuits / R. Galbraith
- The production and transmission of high purity gases for the semiconductor industry / R. Galbraith
- Materials for services pipework / T. Hodgkiess.