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Computational lithography /

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A Unified Summary of the Models and Optimization Methods Used in Computational Lithography. Optical lithography is one of the most challenging areas of current integrated circuit manufacturing technology. The semiconductor industry is relying more on resolution enhancement techniques (RETs), since t...

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Bibliographic Details
Main Author: Ma, Xu, 1983-
Other Authors: Arce, Gonzalo R.
Format: eBook
Language:English
Published: Hoboken, N.J. : Wiley, ©2010.
Series:Wiley series in pure and applied optics.
Subjects:
Microlithography > Mathematics.
Integrated circuits > Design and construction > Mathematics.
Photolithography > Mathematics.
Semiconductors > Etching > Mathematics.
Resolution (Optics)
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by Ma, Xu, 1983-
Published 2010
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by Arce, Gonzalo, Ma, Xu
Published 2010
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