APA (7th ed.) Citation

Ma, X., & Arce, G. R. (2010). Computational lithography. Wiley.

Chicago Style (17th ed.) Citation

Ma, Xu, and Gonzalo R. Arce. Computational Lithography. Hoboken, N.J.: Wiley, 2010.

MLA (9th ed.) Citation

Ma, Xu, and Gonzalo R. Arce. Computational Lithography. Wiley, 2010.