Cover Image

Atomic layer processing : semiconductor dry etching technology /

Bibliographic Details
Main Author: Lill, Thorsten (Author)
Format: eBook
Language:English
Published: Weinheim, Germany : Wiley-VCH, 2021.
Subjects:
Semiconductors > Etching.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Introduction
  • Fundamentals
  • Thermal Etching
  • Thermal Isotropic ALE
  • Radical Etching
  • Directional ALE
  • Reactive Ion Etching
  • Ion Beam Etching
  • Etching Species Generation
  • Emerging Etching Technologies.