Atomic layer processing : semiconductor dry etching technology /

Dry etching for VLSI /
by: Roosmalen, A. J. van
Published: (1991)

Dry etching for microelectronics /
Published: (1984)

Optical lithography for advanced semiconductor patterning /
by: De Bisschop, Peter
Published: (2025)

In-situ patterning : selective area deposition and etching : symposium held November 29-December 1, 1989, Boston, Massachusetts, U.S.A. /
Published: (1990)

Dry etching technology for semiconductors /
by: Nojiri, Kazuo
Published: (2015)

Materials modification by energetic atoms and ions : Symposium held April 28-30, 1992, San Francisco, California, USA /
Published: (1992)

Lithography process control /
by: Levinson, Harry J.
Published: (1999)

Dry etching for VLSI /
by: Roosmalen, A. J. van
Published: (1991)

Applications of plasma processes to VLSI technology /
Published: (1985)

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)

Plasma processing XIII : proceedings of the International Symposium /
Published: (2000)

Laser/optical processing of electronic materials, 10-11 October 1989, Santa Clara, California /
Published: (1990)

Lithography process control /
by: Levinson, Harry J.
Published: (1999)

Selective and non-selective reactive ion etching of gallium arsenide and aluminum gallium arsenide /
by: Yost, Dennis J.
Published: (1989)

Silicon Run Etch :
Published: (2015)

Proceedings of the Symposium on Etching for Pattern Definition /
Published: (1976)

A study on reactive ion etching of barium strontium titanate films using mixtures of argon (Ar), carbon tetrafluoride (CF4), and sulfur hexafluoride (SF6) /
by: Hirsch, Samuel G.
Published: (2014)

Plasma etching processes for CMOS device realization /
Published: (2017)

Silicon micromachining /
by: Elwenspoek, M. (Miko), 1948-
Published: (1998)

Anisotropic reactive ion etching of vanadium dioxide /
by: Radle, Byron K.
Published: (1990)

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)

Handbook of plasma processing technology : fundamentals, etching, deposition, and surface interactions /
Published: (1990)

Lithography process control /
by: Levinson, Harry J.
Published: (1999)

Making an etching /
by: West, Levon, 1900-1968
Published: (1932)

Atomic layer growth and processing : symposium held April 29 - May 1, Anaheim, California, U.S.A. /
Published: (1991)

Chemistry and lithography /
by: Okoroanyanwu, Uzodinma
Published: (2020)

Advanced processes for 193-nm immersion lithography /
by: Wei, Yayi
Published: (2009)

Optical lithography : here is why /
by: Lin, Burn Jeng, 1942-
Published: (2021)

Semiconductor manufacturing handbook /
Published: (2005)

Optical lithography : here is why /
by: Lin, Burn Jeng, 1942-
Published: (2010)

Compound semiconductors strained layers and devices /
by: Jain, S. C. (Suresh C.), 1926-
Published: (2000)

Principles of semiconductor processes and device technology /
by: Zang, Zhigan, et al.
Published: (2026)

Etchings & etchers /
by: Hamerton, Philip Gilbert, 1834-1894
Published: (1902)

Semiconductor technology : processing and novel fabrication techniques /
Published: (1997)

Low molecular weight organic semiconductors /
by: Kampen, Thorsten U.
Published: (2010)

Glass etching : surface techniques and designs /
by: Dobbins, Norman
Published: (1988)